Company Filing History:
Years Active: 1998-2003
Title: Chisako Maeda: Innovator in Acoustic Wave Technology
Introduction
Chisako Maeda is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of acoustic wave technology, holding a total of 5 patents. Her innovative work has garnered attention in both academic and industrial circles.
Latest Patents
One of her latest patents is a film bulk acoustic wave device. This device comprises a silicon substrate, a dielectric film including silicon nitride formed on the substrate, and a silicon oxide on the silicon nitride. It features a bottom electrode formed on the dielectric film, a piezoelectric film on the bottom electrode, and a top electrode on the piezoelectric film. A unique aspect of this invention is the via hole, which is formed by removing a part of the silicon substrate opposite to the region where the top electrode exists.
Another notable patent is related to a process for manufacturing dielectric thin film devices. This process involves forming a lower layer on a substrate, coating a dielectric thin film on the lower layer, and shaping the dielectric thin film into predetermined forms. The dielectric thin film can be formed in a way that it has stress in a direction opposite to that of the dielectric thin film, or it can be divided into shapes after formation.
Career Highlights
Chisako Maeda is currently employed at Mitsubishi Electric Corporation, where she continues to push the boundaries of technology. Her work has not only advanced the field of acoustic devices but has also contributed to the development of new manufacturing processes.
Collaborations
She collaborates with notable colleagues such as Akira Yamada and Fusaoki Uchikawa, enhancing her research and development efforts. Their combined expertise fosters innovation and drives the success of their projects.
Conclusion
Chisako Maeda is a trailblazer in the field of acoustic wave technology, with a strong portfolio of patents and a commitment to innovation. Her contributions are shaping the future of this technology and inspiring the next generation of inventors.