Chinh Dinh

Title: Innovations by Inventor Chinh Dinh

Introduction

Chinh Dinh is a prominent inventor based in San Jose, California, known for his remarkable contributions to the semiconductor processing industry. With a total of four patents to his name, Dinh has made significant advancements that enhance the efficiency and precision of semiconductor manufacturing processes.

Latest Patents

Among Chinh Dinh's latest patents are two notable inventions that showcase his innovative thinking:

1. **Non-intrusive Measurement of a Wafer DC Self-bias in Semiconductor Processing Equipment** - This invention involves applying a direct (DC) voltage to an electrode embedded in an electrostatic chuck within a processing chamber. By measuring the electrostatic chuck current at this voltage, the patent enables the determination of a DC self-bias induced on the workpiece by plasma, thus enhancing measurement methods in semiconductor fabrication.

2. **Temperature Ramping Using Gas Distribution Plate Heat** - This method facilitates the etching of a dielectric layer on a substrate. It includes the innovative technique of de-chucking the substrate from an electrostatic chuck and using a plasma to cyclically etch the dielectric layer at a controlled temperature. By managing sublimation gas flows and temperatures, this method improves the efficiency of the etching process while effectively removing byproducts.

Career Highlights

Chinh Dinh is currently employed at Applied Materials, Inc., a leader in materials engineering solutions, where he utilizes his expertise to push the boundaries of technology within the semiconductor industry. His work is integral to the research and development of innovative processing techniques that are critical in today's high-tech landscape.

Collaborations

Throughout his career, Dinh has collaborated with esteemed colleagues such as Sergey G. Belostotskiy and Qingjun Zhou. These collaborations highlight the importance of teamwork in driving innovation and the development of cutting-edge technologies in semiconductor processing.

Conclusion

With four patents, Chinh Dinh stands out as an influential inventor whose work significantly impacts semiconductor manufacturing. His innovative approaches to measurement and etching processes exemplify the drive for advancements in technology that are essential for the future of the industry. As technology evolves, contributions from inventors like Dinh will continue to play a crucial role in shaping the landscape of semiconductor engineering.