Ching Shan Lu

Title: Innovations of Ching Shan Lu in Semiconductor Technology

Introduction

Ching Shan Lu is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of thermal processing.

Latest Patents

Ching Shan Lu holds a patent for a method titled "Metrology for monitoring a rapid thermal annealing process." This innovative method involves operating an ion implanted to implant ions in a semiconductor wafer at a first ion dose level. It includes performing a first thermal wave measurement to obtain the first thermal wave value. The process continues with placing the semiconductor wafer in a rapid thermal annealing furnace and operating the furnace to rapidly heat the semiconductor wafer at a first rate for a specified time period, aiming to achieve a wafer temperature of 500°C. Following this, a second thermal wave measurement is performed to obtain a second thermal wave value. The difference between the first and second thermal wave values is then compared to a target range of 376.5-382.5. If the difference falls outside this target range, the wafer is rejected as being outside of acceptable specifications.

Career Highlights

Ching Shan Lu is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in enhancing the efficiency and accuracy of semiconductor manufacturing processes.

Collaborations

Ching Shan Lu has collaborated with notable colleagues, including Fu-Su Lee and Wei-Ming You, who have contributed to his research and development efforts.

Conclusion

Ching Shan Lu's innovative work in semiconductor technology, particularly through his patented method for monitoring rapid thermal annealing processes, showcases his significant impact on the industry. His contributions continue to influence advancements in semiconductor manufacturing.