This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2015-2020.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2015-2020
Title: Innovations of Chin-Feng Sun
Introduction
Chin-Feng Sun is a notable inventor based in Zhubei, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on advanced deposition techniques and methods for enhancing semiconductor devices.
Latest Patents
One of his latest patents is for a deposition device structure. This innovative structure includes a heater within a chamber and a shower head positioned above the heater. The shower head features holes that extend from its top surface to its bottom surface, with the bottom surface facing the heater. Notably, the bottom surface has two sections, where the second section is rougher than the first, enhancing its functionality.
Another significant patent involves a method of forming an interlayer dielectric film above a metal gate of a semiconductor device. This method includes the formation of a metal gate above a semiconductor substrate and the subsequent creation of the interlayer dielectric film. The process utilizes a silicon-containing compound as a precursor, which reacts with a reactant to oxidize the silicon compound. The compound is defined by a specific formula, allowing for a range of functional groups that enhance its application in semiconductor technology.
Career Highlights
Chin-Feng Sun is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work there has positioned him as a key player in the development of innovative semiconductor solutions.
Collaborations
He has collaborated with notable colleagues, including Ding-I Liu and Po-Hsiung Leu, contributing to various projects that advance semiconductor technology.
Conclusion
Chin-Feng Sun's contributions to the semiconductor field through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as an influential inventor. His innovative approaches continue to shape the future of semiconductor technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile