Chih-Yuan Tseng

Title: Chih-Yuan Tseng: Innovator in Semiconductor Technology

Introduction

Chih-Yuan Tseng is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His innovative work focuses on methods and apparatuses that enhance the efficiency and effectiveness of semiconductor fabrication processes.

Latest Patents

One of Tseng's latest patents is a method for fabricating polysilicon film. This method involves directly depositing a polysilicon film at low temperatures through a sequential deposition process. The process includes two deposition steps, where different bias voltages are applied to the substrate to form distinct polysilicon sub-layers. These sub-layers together constitute the polysilicon film, showcasing Tseng's expertise in optimizing semiconductor manufacturing techniques.

Another notable patent is a wafer electroplating apparatus designed with a bubble removal function. This apparatus features an electroplating bath main body equipped with an inlet device and a first de-bubble tank. The design allows for efficient removal of bubbles, which can interfere with the electroplating process. The apparatus also includes a baffle to rectify the flow of electroplating solution, further enhancing its functionality.

Career Highlights

Chih-Yuan Tseng is affiliated with the Industrial Technology Research Institute, where he continues to push the boundaries of semiconductor technology. His work has not only contributed to advancements in the field but has also positioned him as a key figure in research and development within the industry.

Collaborations

Tseng collaborates with esteemed colleagues such as Jen-Rong Huang and Pang-Ming Chiang. Their combined expertise fosters an environment of innovation and creativity, leading to groundbreaking advancements in semiconductor technologies.

Conclusion

Chih-Yuan Tseng's contributions to semiconductor technology through his patents and collaborative efforts highlight his role as an influential inventor. His innovative methods and apparatuses continue to shape the future of the industry, making significant strides in the efficiency of semiconductor fabrication processes.