Chih-Kuo Chang

Title: Chih-Kuo Chang: Innovator in Semiconductor Fabrication

Introduction

Chih-Kuo Chang is a notable inventor based in Baoshan Township, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative approaches to fabrication systems.

Latest Patents

Chih-Kuo Chang holds a patent for an "Arcing protection method, processing tool and fabrication system." This invention provides a fabrication system for integrated circuits (IC). The processing tool includes at least one electrode and a radio frequency (RF) sensor. The electrode is designed to receive an RF signal from an RF signal generator during semiconductor manufacturing processes. The RF sensor wirelessly detects the intensity of the RF signal. A computation device extracts statistical characteristics with a sampling rate based on the detected intensity of the RF signal. The fault detection and classification (FDC) system includes a processor that determines whether the detected intensity exceeds a threshold value or range. If the intensity exceeds the threshold, the processor notifies the processing tool to adjust the RF signal or stop the tool to check for parts damage. Chih-Kuo Chang has 1 patent to his name.

Career Highlights

Chih-Kuo Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on enhancing the efficiency and reliability of semiconductor fabrication processes.

Collaborations

Chih-Kuo Chang has collaborated with notable colleagues such as Wun-Kai Tsai and Wen-Che Liang, contributing to advancements in semiconductor technology.

Conclusion

Chih-Kuo Chang's innovative work in semiconductor fabrication has made a significant impact on the industry. His contributions continue to influence the development of more efficient manufacturing processes.