Chih Cheng Shih

Title: Chih Cheng Shih: Innovator in Semiconductor Technology

Introduction

Chih Cheng Shih is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 3 patents that showcase his innovative approach to fabrication processes.

Latest Patents

One of his latest patents is titled "Semiconductor processing tool and methods of operation." This invention includes systems and techniques for fabricating a wafer-on-wafer product using a filled lateral gap between beveled regions of wafers in a stacked-wafer assembly. The patent describes a deposition tool equipped with an electrode that enhances the electromagnetic field during deposition operations, improving the efficiency of material deposition.

Another notable patent is "Tunable plasma exclusion zone in semiconductor fabrication." This invention provides a method for generating a plasma within a chamber while excluding it from the edge region of a semiconductor wafer. The plasma exclusion zone (PEZ) ring allows for tuning the plasma toward the center of the wafer, optimizing the fabrication process.

Career Highlights

Chih Cheng Shih works at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on advancing semiconductor fabrication techniques, contributing to the company's reputation for innovation and excellence.

Collaborations

He has collaborated with notable coworkers such as Sheng-Chan Li and Cheng-Yuan Tsai, further enhancing the innovative environment at his workplace.

Conclusion

Chih Cheng Shih's contributions to semiconductor technology through his patents reflect his commitment to innovation in the field. His work continues to influence the industry and pave the way for future advancements.