Chien-Ta Lee

Title: Chien-Ta Lee: Semiconductor Process Inventor

Introduction

Chien-Ta Lee is an inventor associated with Yilan, Taiwan. His patent work concerns chemical vapor deposition equipment and its operation. He is associated with Taiwan Semiconductor Manufacturing Company, Ltd.

Latest Patents

Lee is credited with 1 patent: “Chemical Vapor Deposition Tool and Operating Method Thereof.” The invention describes a chemical vapor deposition tool with a processing chamber and a remote plasma system connected to that chamber. A first gas passage carries gas from a first source through the remote plasma system and into the chamber. A second passage delivers gas from a separate source directly to the chamber, bypassing the remote plasma system.

Career Highlights

Lee’s documented patent contribution focuses on semiconductor manufacturing equipment. The described tool uses separate gas routes, allowing one gas stream to pass through remote plasma processing while another reaches the processing chamber without doing so.

Collaborations

Lee’s listed coworkers include Pen-Li Hung and Yu-Shan Shih. The patent description identifies the equipment and gas-flow arrangement but does not specify the individual contributions of these coworkers.

Conclusion

Chien-Ta Lee’s patent highlights an approach to chemical vapor deposition that combines remote plasma processing with a separate bypass gas path for semiconductor manufacturing.