Chien-Ta Feng

Title: Chien-Ta Feng: Innovating Wafer Charge Monitoring Technology

Introduction

Chien-Ta Feng is a notable inventor based in Tainan, Taiwan, recognized for his significant contributions to wafer charge monitoring technology. With experience leading to the acquisition of two patents, Feng is making strides in the field of semiconductor technology through his inventive approaches.

Latest Patents

Feng's latest patent revolves around the apparatus and method for monitoring wafer charges. This innovative technology utilizes a conductive pin, conductive spring, and conductive line arranged in series to connect the backside surface of the wafer to a sample conductor. By ensuring that both the backside surface of the wafer and the surface of the sample conductor maintain identical charge density, the invention allows for precise monitoring of charges using a static electricity sensor placed near the sample conductor. This setup effectively reduces contamination risks by positioning the sample conductor and static electricity sensor outside of the processing chamber where the wafer is located. Notably, the design also accounts for the charge influence from the frontside surface of the wafer, enabling comprehensive monitoring.

Career Highlights

Chien-Ta Feng is currently associated with Advanced Ion Beam Technology, Inc., where he applies his expertise in semiconductor processes. His work focuses on advancing the technology used in wafer charge monitoring, making crucial contributions to the field of ion beam applications.

Collaborations

Throughout his career, Feng has collaborated with fellow innovators, including Chih-Chiang Wu and Chun-Chin Kang. These partnerships underline the importance of teamwork in fostering innovation and tackling complex challenges within the technology sector.

Conclusion

With his inventive solutions and collaborative spirit, Chien-Ta Feng is paving the way for advancements in wafer charge monitoring technology. His patents not only exemplify his creativity and dedication as an inventor but also highlight the ongoing evolution of semiconductor technology in which he plays a vital role.