Chien Hung Wu

Title: Chien Hung Wu: Innovator in MEMS Technology

Introduction

Chien Hung Wu is a notable inventor based in Parma Heights, OH (US). He has made significant contributions to the field of micro-electromechanical systems (MEMS), particularly in the development of innovative technologies that enhance optical applications.

Latest Patents

Wu holds a patent for "MEMS micro mirrors driven by electrodes fabricated on another substrate." This invention involves an array of electrostatically tiltable mirrors formed in a MEMS structure. A first silicon-on-insulator (SOI) wafer is etched to create an array of tiltable plates, which are joined to the remainder of the wafer through pairs of torsion beams. A second SOI wafer is also etched to form cavities corresponding to these tiltable plates. The design includes a ceramic multi-chip module (MCM) carrier with multiple layers of wiring and electrodes that correspond to the tiltable plates. The two SOI wafers are bonded together, and after removing the handle layer of the second SOI, the bonded wafers are diced into chips. Each chip is then bonded to its respective MCM carrier. Finally, the handle layer of the first SOI wafer is removed to release the tiltable mirror plates and torsion beams, allowing for the integration of electronic control chips.

Career Highlights

Chien Hung Wu is currently associated with Movaz Networks, Inc., where he continues to push the boundaries of MEMS technology. His work has been instrumental in advancing the capabilities of optical devices, making them more efficient and versatile.

Collaborations

Wu has collaborated with notable colleagues, including Narayanan Rajan and Jay S Mitchell, who have contributed to his innovative projects and research endeavors.

Conclusion

Chien Hung Wu's contributions to MEMS technology, particularly through his patented innovations, highlight his role as a leading inventor in the field. His work continues to influence advancements in optical applications and micro-electromechanical systems.