Chian-kun Chan

Title: Chian-kun Chan: Innovator in Semiconductor Technology

Introduction

Chian-kun Chan is a prominent inventor based in Zhudong, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent that enhances substrate transport in semiconductor manufacturing.

Latest Patents

Chian-kun Chan holds a patent for a "Semiconductor apparatus with transportable edge ring for substrate transport." This invention provides a substrate stage that is a rotatable disc with a solid surface and a terraced edge featuring upper, intermediate, and lower portions of increasing diameter. The apparatus includes a hollow edge ring that rests on the intermediate edge portion. A substrate placed on the rotatable disc is lifted and transported by robot blades positioned beneath the edge ring, which holds the substrate around its edges. This technology finds applications in Metal-Organic Chemical Vapor Deposition (MOCVD) and other semiconductor manufacturing tools. He has 1 patent to his name.

Career Highlights

Chian-kun Chan is associated with Taiwan Semiconductor Manufacturing Company Ltd., a leading player in the semiconductor industry. His work focuses on improving the efficiency and effectiveness of semiconductor processing techniques.

Collaborations

Chian-kun Chan has collaborated with notable colleagues, including Chih-Chang Hsieh and Chung-chieh Hsu, contributing to advancements in semiconductor technology.

Conclusion

Chian-kun Chan's innovative work in semiconductor technology, particularly his patented apparatus for substrate transport, showcases his commitment to enhancing manufacturing processes. His contributions continue to influence the semiconductor industry positively.