Chian-Kun Chan

Title: Innovations in Semiconductor Technology: The Contributions of Chian-Kun Chan

Introduction: Chian-Kun Chan, an innovative inventor based in Zhudong, Taiwan, has made significant strides in the field of semiconductor technology. With a focus on enhancing substrate transport methods, Chan's work has implications for the efficiency of semiconductor manufacturing.

Latest Patents: Chan holds a patent for a "Semiconductor apparatus with transportable edge ring for substrate transport." This invention presents a novel apparatus and method for processing semiconductor substrates. It features a rotatable disc serving as a substrate stage with a solid surface and a terraced edge, which consists of upper, intermediate, and lower portions of increasing diameter. The apparatus demonstrates a hollow edge ring that rests on the intermediate edge portion. A substrate, placed on the rotatable disc, is efficiently lifted and transported by robot blades positioned beneath the edge ring. These blades elevate the edge ring, which securely holds the substrate around its edges. This innovation is particularly relevant for Metal-Organic Chemical Vapor Deposition (MOCVD) and other tools used in semiconductor manufacturing.

Career Highlights: Chian-Kun Chan is currently affiliated with Taiwan Semiconductor Manufacturing Company Limited, a leading figure in the global semiconductor industry. His expertise and inventive spirit have contributed to advancements that are critical in maintaining competitive efficiency in semiconductor production.

Collaborations: Throughout his career, Chan has collaborated with notable colleagues in the industry, including Chih-Chang Hsieh and Yung-Kai Lin. These partnerships have fostered a collaborative environment that encourages innovation and the advancement of semiconductor technologies.

Conclusion: As an inventor, Chian-Kun Chan exemplifies the spirit of innovation in the semiconductor industry. His patented invention not only showcases his ingenuity but also supports the ongoing evolution of technologies that drive the semiconductor manufacturing process forward. Chan's contributions highlight the importance of creativity and collaboration in achieving breakthroughs in this vital sector.