This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2020.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2020
Title: Chiah-Chih Chen and Plasma Ion Measurement
Introduction
Chiah-Chih Chen is an inventor associated with Hsinchu, Taiwan. Her patent work addresses measuring ion distribution in plasma systems, with an application relevant to monitoring wafer processing.
Latest Patents
Chen is named on 1 patent, titled “Ion Collector for Use in Plasma Systems.” The invention describes an ion collector with multiple physically separated segments arranged around a substrate support. Each segment has a conductive element that carries current in response to ions from a plasma, and a corresponding integrator uses that current to determine the ion distribution at that segment. By comparing measurements across the segments, the system can help assess how uniformly ions are distributed across a wafer during plasma processing.
Career Highlights
Chen is associated with Taiwan Semiconductor Manufacturing Company Limited. Her patent reflects work on plasma-process monitoring and the measurement of ion distribution.
Collaborations
The supplied information identifies Otto Chen and Chi-Ying Wu as Chen’s coworkers. Their specific roles in the patent or related work are not provided.
Conclusion
Chiah-Chih Chen’s patent describes a segmented ion-collection system designed to help evaluate ion-distribution uniformity during plasma processing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile