Chia-Hung Lu

Title: Innovations of Chia-Hung Lu in Semiconductor Technology

Introduction

Chia-Hung Lu is a notable inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the fabrication of shallow trench isolation structures. His innovative methods have implications for memory and peripheral regions in semiconductor devices.

Latest Patents

Chia-Hung Lu holds a patent titled "Method for fabricating shallow trench isolation structures." This patent describes a process that involves forming a patterned pad layer and a patterned mask layer on a substrate. The substrate is then partially removed to create trenches, followed by the formation of a first liner layer. The method emphasizes the importance of varying the pull-back amount of the patterned mask layer in different regions, ultimately leading to the creation of shallow trench isolation structures.

Career Highlights

Chia-Hung Lu is associated with Winbond Electronics Corporation, a leading company in the semiconductor industry. His work at Winbond has allowed him to apply his innovative ideas in practical applications, contributing to advancements in memory technology.

Collaborations

Chia-Hung Lu collaborates with his coworker, Chih-Jung Ni, to further enhance their research and development efforts in semiconductor technologies.

Conclusion

Chia-Hung Lu's contributions to the field of semiconductor technology, particularly through his patent on shallow trench isolation structures, highlight his role as an influential inventor. His work continues to impact the industry positively.