Chia-Chun Cheng

Title: Innovations by Chia-Chun Cheng

Introduction

Chia-Chun Cheng is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of seven patents. His work focuses on improving the quality and efficiency of semiconductor manufacturing processes.

Latest Patents

One of his latest patents is titled "Method for forming a high quality chemical oxide on a freshly cleaned silicon surface as a native oxide replacement." This patent describes a continuous and integrated cleaning and preparation process for conditioning a silicon surface. The process involves immersing the wafer surface in an aqueous solution, which is varied continuously throughout the steps. It includes the removal of contaminants and particulates, followed by the elimination of native oxide. The silicon surface is then treated in the presence of HF and ozone, resulting in the growth of a high-quality chemical oxide. This oxide is of higher purity and structural quality than native oxide, leading to improved device performance.

Another notable patent is the "Electrostatic charge-free solvent-type dryer for semiconductor wafers." This invention provides a solution for drying semiconductor wafers after a wet bench process. The dryer is designed to prevent the generation of electrostatic charge during the drying process. It includes a tank body, wafer carrier, elevator means, and a conduit for solvent vapor flow. The materials used in the construction of the dryer are selected to ensure that electrostatic charge is not generated.

Career Highlights

Chia-Chun Cheng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work has contributed to advancements in semiconductor manufacturing, enhancing the performance and reliability of electronic devices.

Collaborations

Chia-Chun Cheng has collaborated with notable colleagues, including Jih-Churng Twu and Ming-Dar Guo. Their combined expertise has fostered a productive environment for innovation and development in semiconductor technologies.

Conclusion

Chia-Chun Cheng's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the advancement of semiconductor manufacturing processes, ensuring higher quality and performance in electronic devices.