Chia-Au Bill Lu

Title: Innovations of Chia-Au Bill Lu

Introduction

Chia-Au Bill Lu is a notable inventor based in Irvine, CA, who has made significant contributions to the field of semiconductor technology. His innovative work has led to the development of a unique patent that enhances the efficiency of semiconductor wafer processing systems.

Latest Patents

One of his key patents is titled "Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system." This invention features a cathode assembly that includes a pedestal and a detachable susceptor. The design incorporates various contact assemblies that utilize a canted spring to establish electrical connections between the pedestal and the detachable susceptor. The canted spring is uniquely designed with coils tilted in one direction, forming a doughnut shape. This configuration allows for multiple parallel self-loading electrical connections, ensuring reliable RF electrical energy transfer. The innovative canted spring contact enables flat contact between the pedestal and the chuck, enhancing the overall performance of the system.

Career Highlights

Chia-Au Bill Lu is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has positioned him as a key player in advancing semiconductor technologies.

Collaborations

Throughout his career, Chia-Au has collaborated with several talented individuals, including Gilbert Hausmann and Anantha K Subramani. These collaborations have contributed to the development of innovative solutions in the semiconductor field.

Conclusion

Chia-Au Bill Lu's contributions to semiconductor technology through his patent and work at Applied Materials, Inc. highlight his role as an influential inventor in the industry. His innovative designs continue to impact the efficiency of semiconductor wafer processing systems.