The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2001
Filed:
Sep. 30, 1998
Gilbert Hausmann, Ben Lomond, CA (US);
Anantha Subramani, San Jose, CA (US);
Peter Satitpunwaycha, Santa Clara, CA (US);
Raymond Gristi, San Jose, CA (US);
Bradley O. Stimson, San Jose, CA (US);
Chia-Au Bill Lu, Irvine, CA (US);
Lawrance A. Ringor, Mountain View, CA (US);
Michael N. Sugarman, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A cathode assembly having a pedestal and a detachable susceptor. Various contact assemblies containing a canted spring are utilized to make electrical connection between the pedestal and detachable susceptor. The canted spring has coils that are tilted in one direction and joined end to end to form a doughnut shape. Such a spring creates multiple parallel self-loading electrical connections via the turns of the spring. The turns act like electrical wires to ensure reliable RF electrical energy transfer. The canted spring contact of the present invention allows for flat contact between the pedestal and the chuck.