Company Filing History:
Years Active: 2001
Title: **Chi Kwan Lau: Innovator in Semiconductor Fabrication**
Introduction
Chi Kwan Lau, based in Singapore, is a distinguished inventor in the field of semiconductor technology. With his innovative approach, he has significantly contributed to the development of processes that enhance the efficiency and precision of semiconductor fabrication.
Latest Patents
Chi Kwan Lau holds a patent for a process to achieve uniform groove depth in a silicon substrate. This groundbreaking process focuses on forming a groove in a semiconductor substrate, particularly for the fabrication of grooved gate MOSFET devices. The invention makes use of an insulator mask, which serves as an etch mask for defining the groove feature in the semiconductor substrate. Employing a selective, anisotropic reactive ion etching (RIE) procedure, this technique utilizes an etchant with a specific etch rate ratio of silicon to silicon oxide. This ensures that the desired groove depth can be accurately established without any alteration during the overetch cycle, thus maintaining the integrity of the fabricating process.
Career Highlights
Chi Kwan Lau is affiliated with Chartered Semiconductor Manufacturing Ltd, where he applies his expertise in semiconductor technology. His innovative contributions place him as a key figure within the company, helping to advance the field of semiconductor fabrication through his patented processes.
Collaborations
Throughout his career, Chi Kwan Lau has worked closely with notable colleagues, including Ganesh S Samudra and Krishnasamy Rajendran. These collaborations emphasize the importance of teamwork in driving innovation and achieving technological advancements in semiconductor research and development.
Conclusion
Chi Kwan Lau’s commitment to innovation in semiconductor technology is evident through his patent and collaborative efforts. His work continues to impact the efficiency of semiconductor fabrication and reflects a significant contribution to the industry, positioning him as a noteworthy inventor in the field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.