This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignees: Hermes Microvision Inc., Hermes-Epitek Corporation. Active years: 2010-2013.
Company Filing History:
Years Active: 2010-2013
Title: Innovations of Inventor Chi-Hua Tseng
Introduction
Chi-Hua Tseng is an accomplished inventor based in Jubei, Taiwan, whose work has led to the development of two notable patents. His innovative contributions are predominantly in the field of plasma processing chambers and electron beam apparatuses, showcasing his expertise in advanced technology and materials.
Latest Patents
Chi-Hua Tseng's latest patents include:
1. **Electrode Design for Plasma Processing Chamber** - This invention features an upper electrode designed for plasma processing chambers, which consists of a center segment and multiple outer segments. These outer segments can be added or removed, allowing for flexible adjustments to the overall electrode size, gas spurting region, and thickness. The design is innovative in that it allows for selective formation of gas distribution holes in both the center and outer segments, enhancing the versatility of the electrode.
2. **Electron Beam Apparatus to Collect Side-View and/or Plane-View Image with In-Lens Sectional Detector** - This patent details an apparatus and method for producing side-view and plane-view scanning electron microscopy (SEM) imagery. The design incorporates an electron source, intermediate lenses, an objective lens that uses both immersion magnetic and retarding electrostatic techniques, and an in-lens sectional detector. This configuration allows the collection of secondary electrons at varying angles, facilitating detailed imaging of specimen surfaces.
Career Highlights
Throughout his career, Chi-Hua Tseng has been associated with prominent companies within the technology sector, including Hermes Microvision Inc. and Hermes-Epitek Corporation. His professional journey reflects a deep commitment to advancing the capabilities of electron beam and plasma processing technologies.
Collaborations
Chi-Hua Tseng has collaborated with notable professionals in his field, including colleagues Zhong-Wei Chen and Xuedong Liu. These partnerships have likely enriched his inventions and contributed to expanding the boundaries of current technological understanding.
Conclusion
Through his inventive work, Chi-Hua Tseng has made significant strides in the realms of plasma technology and electron beam apparatuses. His patents not only enhance existing technological frameworks but also pave the way for future innovations in the field. His career serves as a testament to the impact inventors can have on technology and industry.