Company Filing History:
Years Active: 2019-2020
Title: Chethan Mangalore: Innovator in Electrostatic Technology
Introduction
Chethan Mangalore is a prominent inventor based in Bengaluru, India. He has made significant contributions to the field of electrostatic technology, holding 2 patents that showcase his innovative spirit and technical expertise.
Latest Patents
One of his latest patents is an electrostatic chuck with an embossed top plate and cooling channels. This invention provides a solution for retaining substrates, featuring a susceptor with an electrically conductive base and multiple cooling channels. The design includes a raised central support and a dielectric top plate with an embossed surface, allowing for efficient cooling gas delivery to the substrate. Another notable patent is the source RF power split inner coil, which aims to improve BCD and etch depth performance. This invention includes a radial frequency plasma source with a split type inner coil assembly, designed to enhance the efficiency of plasma applications.
Career Highlights
Chethan Mangalore is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work focuses on developing advanced technologies that enhance manufacturing processes in the semiconductor industry.
Collaborations
Throughout his career, Chethan has collaborated with talented individuals such as Arumuga Balan and Jeonghoon Oh. These collaborations have contributed to the successful development of innovative technologies and patents.
Conclusion
Chethan Mangalore's contributions to electrostatic technology and his innovative patents reflect his dedication to advancing the field. His work at Applied Materials, Inc. continues to influence the semiconductor industry positively.