Company Filing History:
Years Active: 2020-2022
Title: Cheng-Mao Chien: Innovator in Wafer Technology
Introduction
Cheng-Mao Chien is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of wafer technology, holding a total of 2 patents. His work focuses on improving the efficiency and safety of wafer handling processes.
Latest Patents
Chien's latest patents include an innovative apparatus and method for monitoring the relative relationship between the wafer and the chuck. This technology is particularly designed to monitor whether the wafer is sticky on the chuck during the de-chucking process. The system utilizes lift pins that can extend outside the chuck to separate the wafer from it when de-chucking occurs. By detecting the capacitance between the de-chucked wafer and the chuck, the system can determine if the wafer is sticky or if it is properly supported by the lift pins. This capability allows for early alarms to be issued in case of any issues, enhancing the safety and reliability of the wafer handling process.
Career Highlights
Cheng-Mao Chien is currently employed at Advanced Ion Beam Technology, Inc., where he continues to develop innovative solutions in the semiconductor industry. His expertise in wafer technology has positioned him as a key player in his field.
Collaborations
Chien has collaborated with notable colleagues such as Te-Min Wang and Yu-Ho Ni, contributing to advancements in wafer technology through teamwork and shared expertise.
Conclusion
Cheng-Mao Chien's contributions to wafer technology demonstrate his commitment to innovation and safety in semiconductor processes. His patents reflect a deep understanding of the challenges in wafer handling, making him a valuable inventor in this specialized field.