Company Filing History:
Years Active: 2020-2025
Title: Innovations of Cheng-Hsuen Chiang
Introduction
Cheng-Hsuen Chiang is a notable inventor based in Miaoli, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the development of photo masks. With a total of 4 patents to his name, his work has had a considerable impact on the industry.
Latest Patents
One of his latest patents is a method of manufacturing phase shift photo masks. In this method, a resist layer is formed over a mask blank, which includes a mask substrate, a phase shift layer disposed on the mask substrate, and a light blocking layer disposed on the phase shift layer. A resist pattern is created using a lithographic operation. The light blocking layer is then patterned by using the resist pattern as an etching mask. Following this, the phase shift layer is patterned by utilizing the patterned light blocking layer as an etching mask. A border region of the mask substrate is covered with an etching hard cover, while a pattern region of the mask substrate is opened. The patterned light blocking layer in the pattern region is patterned through the opening of the etching hard cover. Finally, a photo-etching operation is performed on the pattern region to remove residues of the light blocking layer.
Career Highlights
Cheng-Hsuen Chiang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate and contribute to advancements in semiconductor technology. His expertise in manufacturing processes has positioned him as a valuable asset in the industry.
Collaborations
Cheng-Hsuen has collaborated with notable coworkers such as Cheng-Ming Lin and Hao-Ming Chang, further enhancing the innovative environment in which he works.
Conclusion
Cheng-Hsuen Chiang's contributions to the field of semiconductor manufacturing, particularly through his patents on photo masks, highlight his role as a significant inventor in the industry. His ongoing work at Taiwan Semiconductor Manufacturing Company Limited continues to influence advancements in technology.