This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Cheng-Hao Lai: Innovator in Droplet Generation Technology
Introduction
Cheng-Hao Lai is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of droplet generation technology, particularly in the context of semiconductor manufacturing. His innovative work has led to the development of a unique patent that enhances the efficiency of droplet generation processes.
Latest Patents
Cheng-Hao Lai holds a patent for a "Droplet generator assembly and method of replacing components." This patent describes a modularized vessel droplet generator assembly (MGDVA) that includes a droplet generator assembly (DGA). Under normal operation, liquid fuel moves along an operation pathway through the DGA, ejecting the liquid fuel, such as liquid tin, from a nozzle into a vacuum chamber. The liquid fuel in the vacuum chamber is then exposed to a laser that generates extreme ultra-violet (EUV) light. During service operations, the operation pathway is closed, and a service pathway is opened, allowing gas to form a gas-liquid interface with the liquid fuel. This innovative design facilitates efficient isolation and maintenance of the droplet generator assembly.
Career Highlights
Cheng-Hao Lai is currently employed at Taiwan Semiconductor Manufacturing Co., Ltd. His work at this leading semiconductor company has positioned him at the forefront of technological advancements in droplet generation. His contributions have been instrumental in improving the efficiency and reliability of semiconductor manufacturing processes.
Collaborations
Cheng-Hao Lai has collaborated with notable colleagues, including Yu-Kuang Sun and Ming-Hsun Tsai. These collaborations have fostered a productive environment for innovation and have led to significant advancements in their respective fields.
Conclusion
Cheng-Hao Lai is a distinguished inventor whose work in droplet generation technology has made a lasting impact on the semiconductor industry. His innovative patent and contributions to Taiwan Semiconductor Manufacturing Co., Ltd. highlight his commitment to advancing technology and improving manufacturing processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile