Chen-Yi Liu

Title: The Innovative Contributions of Inventor Chen-Yi Liu

Introduction

Chen-Yi Liu is a prominent inventor based in Pingtung, Taiwan, known for his significant contributions in the field of semiconductor technology. With two patents to his name, Liu has made remarkable advancements that enhance the efficiency and effectiveness of etching processes in semiconductor manufacturing.

Latest Patents

One of Chen-Yi Liu's latest patents is focused on a thermal pad designed for etch rate uniformity. This innovative thermal pad is strategically positioned between an insert ring and an electrostatic chuck within an etching chamber. Its primary function is to provide a continuous passive heat path that efficiently dissipates heat from the insert ring and the wafer edge to the electrostatic chuck. By maintaining a consistent temperature across the various components in contact with or near the wafer, the thermal pad plays a crucial role in ensuring that the etch rate remains uniform. This is particularly important when etching hard masks over dummy gate formations, enabling a more reliable and consistent etch process.

The thermal pad’s design aids in achieving etch rate uniformity not only at the edge of the wafer but also across the entire surface, which is vital for processes such as gate replacement that involves the removal of hard mask layers over dummy gate electrodes.

Career Highlights

Liu's career is marked by his work at Taiwan Semiconductor Manufacturing Company Limited, where he has applied his innovative spirit to solve complex challenges in the semiconductor domain. His patents reflect a commitment to improving manufacturing processes and enhancing product quality in the competitive landscape of semiconductor technology.

Collaborations

Throughout his career, Chen-Yi Liu has collaborated with esteemed colleagues, including Chin-Huei Chiu and Tsung Fan Yin. These partnerships within Taiwan Semiconductor Manufacturing Company Limited have fostered a culture of innovation, leading to the development of cutting-edge solutions in semiconductor manufacturing.

Conclusion

Inventor Chen-Yi Liu stands out for his contributions to the field of semiconductor technology. His innovative patents, particularly the thermal pad for etch rate uniformity, exemplify his commitment to enhancing the efficiency of manufacturing processes. As he continues to work alongside talented colleagues, Liu is poised to contribute even more groundbreaking advancements in the semiconductor industry, ultimately benefiting the broader field of electronics and technology.