Location History:
- Sherwood, OR (US) (2020 - 2022)
- Taiwan, TW (2023)
Company Filing History:
Years Active: 2020-2025
Title: Innovations of Chen-Hua Hsu in Semiconductor Processing
Introduction
Chen-Hua Hsu is a notable inventor based in Sherwood, Oregon, who has made significant contributions to the field of semiconductor processing. With a total of 5 patents to his name, Hsu's work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of Hsu's latest patents is titled "Ex situ coating of chamber components for semiconductor processing." This innovation involves forming a protective coating ex situ in an atomic layer deposition process to coat one or more chamber components that are subsequently installed in a reaction chamber. This method offers several advantages over traditional coating techniques, such as in situ deposition of an undercoat. The protective coating can consist of materials like aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, and/or yttrium fluoride. This coating helps reduce contamination on wafers processed using the coated chamber component. Additionally, it stabilizes the processing conditions within the reaction chamber, leading to very stable and uniform processing results over multiple batches of wafers while minimizing radical loss. Hsu's patent also describes various techniques to restore the protective coating after the coated chamber component has been used in semiconductor wafer processing.
Career Highlights
Chen-Hua Hsu is currently employed at Lam Research Corporation, where he continues to innovate and contribute to advancements in semiconductor technology. His expertise and dedication to improving semiconductor processing have made him a valuable asset to the company.
Collaborations
Hsu has collaborated with notable colleagues, including Guangbi Yuan and Bo Gong, to further enhance the research and development efforts in semiconductor processing.
Conclusion
Chen-Hua Hsu's innovative work in semiconductor processing, particularly through his patented techniques, showcases his commitment to advancing technology in this critical field. His contributions are paving the way for more efficient and effective semiconductor manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.