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Singapore, Singapore

Chen Feng

USPTO Granted Patents = 5 (Patent Applications = 2)

Average Co-Inventor Count = 4.6

ph-index = 4

Forward Citations = 37(Granted Patents)

Company Filing History:

Chartered Semiconductor Manufacturing Ltd (corporation)

Years Active: 2002-2004

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5 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 6726545 - Linear polishing for improving substrate uniformity (2004-04-27),

2. 6663472 - Multiple step CMP polishing (2003-12-16),

3. 6475875 - Shallow trench isolation elevation uniformity via insertion of a polysilicon etch layer (2002-11-05),

4. 6436833 - Method for pre-STI-CMP planarization using poly-si thermal oxidation (2002-08-20),

5. 6403484 - Method to achieve STI planarization (2002-06-11),

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