This inventor holds 1 USPTO granted patent and 3 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Chen-Chi Tang: Innovator in Chemical Mechanical Polishing
Introduction
Chen-Chi Tang is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of chemical mechanical polishing (CMP), which is crucial in semiconductor manufacturing. His innovative work focuses on improving the efficiency and effectiveness of CMP processes.
Latest Patents
Chen-Chi Tang holds a patent for an "Apparatus and methods for chemical mechanical polishing." This patent describes a CMP tool and methods for planarizing a substrate. The invention includes an in-situ defect data analyzer that identifies CMP-induced defects during polishing and cleaning processes. Notably, the CMP tool features an AI-assisted defect database that classifies defects such as scratches and slurry residuals. This advancement significantly improves the defect warning cycle time for CMP processes.
Career Highlights
Chen-Chi Tang is associated with Taiwan Semiconductor Manufacturing Company Limited, a leader in the semiconductor industry. His work has been instrumental in enhancing the quality and reliability of semiconductor devices through innovative polishing techniques.
Collaborations
Chen-Chi Tang has collaborated with notable colleagues, including Te-Chien Hou and Chi-Hsiang Shen. Their combined expertise has contributed to advancements in CMP technology.
Conclusion
Chen-Chi Tang's contributions to chemical mechanical polishing demonstrate his commitment to innovation in the semiconductor industry. His work continues to influence the efficiency of manufacturing processes, showcasing the importance of technological advancements in this field.