This inventor holds 1 USPTO granted patent. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2001.
Company Filing History:
Years Active: 2001
Title: Cheh-Chieh Lu: Innovator in Semiconductor Technology
Introduction
Cheh-Chieh Lu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the processing and integration of copper interconnects. His innovative methods have the potential to enhance the efficiency and reliability of semiconductor devices.
Latest Patents
Cheh-Chieh Lu holds a patent for a method titled "Method for processing and integrating copper interconnects." This invention focuses on forming copper interconnects without inducing copper diffusion by eliminating the copper chemical-mechanical polishing process. The patent outlines a detailed process involving the formation of a semiconductor structure with a first metal layer, inter-metal dielectric layers, and a series of patterning and electroplating steps to create effective copper interconnects.
Career Highlights
Lu is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work has contributed to advancements in semiconductor manufacturing processes, showcasing his expertise and commitment to innovation.
Collaborations
Throughout his career, Cheh-Chieh Lu has collaborated with notable colleagues, including Fu-Sheng Lee and Chien-Chen Chen. These collaborations have fostered a productive environment for innovation and development in semiconductor technologies.
Conclusion
Cheh-Chieh Lu's contributions to semiconductor technology, particularly through his patented methods for copper interconnects, highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor manufacturing processes.