Company Filing History:
Years Active: 1997
Title: Innovator Spotlight: Chaur Rong Chang and His Defect-Free Tungsten Plug Patent
Introduction: Chaur Rong Chang is a distinguished inventor based in Hsin-Chu, Taiwan. With his expertise in semiconductor technologies, he has made a significant contribution to the field of metallization through his innovative patent.
Latest Patents: Chang holds a noteworthy patent titled "Volcano Defect-Free Tungsten Plug." This invention presents a new method of metallization that utilizes a tungsten plug, providing enhanced functionalities for semiconductor device structures. The patent describes a process that involves covering a semiconductor substrate with an insulating layer and creating contact openings to facilitate effective electrical connections. A conformally deposited barrier layer and a stress buffer layer aid in preventing volcano defects, culminating in the formation of a flawless tungsten plug within the contact opening. This advancement is paramount for the fabrication of integrated circuit devices.
Career Highlights: Chaur Rong Chang currently works at Taiwan Semiconductor Manufacturing Company Limited, a leader in semiconductor manufacturing. His work focuses on improving the reliability and efficiency of semiconductor device production through innovative techniques. With one patent to his name, he continues to be a key figure in the development of next-generation technologies.
Collaborations: Throughout his career, Chang has collaborated with talented individuals such as Po-Tao Chu and Tzu-Min Peng. Their combined expertise has fostered an environment of innovation, allowing them to push the boundaries of semiconductor processing further than ever before.
Conclusion: Chaur Rong Chang's contributions to the field of semiconductor technology, particularly through his volcano defect-free tungsten plug patent, demonstrate the importance of innovation in advancing electronic devices. His work at Taiwan Semiconductor Manufacturing Company Limited, along with collaborations with esteemed colleagues, underlines his role as a pivotal inventor in the industry.