Charng-Long Lu

Title: Charng-Long Lu: Innovator in Semiconductor Measurement Technologies

Introduction

Charng-Long Lu is a prominent inventor based in Yunlin County, Taiwan. He has made significant contributions to the field of semiconductor device fabrication, holding a total of 2 patents. His work focuses on improving measurement techniques that are crucial for the semiconductor manufacturing process.

Latest Patents

Charng-Long Lu's latest patents include innovative methods for measuring semiconductor device fabrication tool implements. One of his patents describes a method that utilizes a laser-based measurement tool to assess the surface profile of a semiconductor fabrication process tool, such as a susceptor. This method involves delivering the tool to the measurement device, where multiple measurements are taken using blue wavelength radiation. The data collected provides insights into the surface profile, which is essential for ensuring the quality of layers deposited on target substrates. Another patent outlines a similar system and method, emphasizing the importance of precise measurements in semiconductor manufacturing.

Career Highlights

Charng-Long Lu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise in measurement technologies has positioned him as a valuable asset to the company, contributing to advancements in fabrication processes.

Collaborations

Throughout his career, Charng-Long Lu has collaborated with notable colleagues, including Shih-Wei Hung and Chien-Feng Lin. These partnerships have fostered innovation and enhanced the development of measurement techniques in semiconductor manufacturing.

Conclusion

Charng-Long Lu's contributions to semiconductor measurement technologies highlight his role as an influential inventor in the industry. His patents reflect a commitment to improving fabrication processes, ensuring high-quality semiconductor devices.