Company Filing History:
Years Active: 1994-1998
Title: **Innovations by Inventor Charles W. Stager in Austin, TX**
Introduction
Charles W. Stager is a prominent inventor based in Austin, Texas, known for his significant contributions to the field of chemical-mechanical polishing processes. With a total of two patents to his name, he has demonstrated exceptional innovation in the development of techniques for enhancing the performance of metallized pads and optimizing material processing.
Latest Patents
Stager's latest patents focus on advanced methodologies for polishing and planarizing surfaces in the semiconductor industry. His first patent, titled "Metallized Pad Polishing Process," introduces a novel chemical-mechanical-polishing (CMP) technique. This process entails applying titanium to the surface of a polishing pad, utilizing various methods including abrasively applying titanium with a titanium block attached to a rotating disk and integrating it with a carrier ring. Additionally, he explores the possibility of impregnating felt layers with titanium particles or introducing titanium directly into the polishing slurry.
The second patent, “Method for Processing a Layer of Material While Using In-Situ Monitoring,” outlines a method for planarizing materials deposited on semiconductor wafers. In this innovative process, a top layer is formed over a non-planar surface, allowing for a controlled etching process. By closely monitoring either the wafer surface or the etch environment, the etch rates are maintained within a specified tolerance range, resulting in an optimal planar surface.
Career Highlights
Charles W. Stager has cultivated a successful career at Motorola Corporation, where he has applied his expertise in material processing and polishing technology. His inventive spirit and contributions to refining semiconductor manufacturing processes have earned him recognition within the industry.
Collaborations
Throughout his career, Stager has collaborated with notable colleagues such as Paul M. Winebarger and Gregory S. Ferguson. Their combined efforts have contributed to advancements in semiconductor processing technologies, enhancing the overall efficiency and effectiveness of manufacturing procedures.
Conclusion
Charles W. Stager stands out as a notable inventor in the field of semiconductor technology. His innovative patents reflect a commitment to enhancing polishing techniques and improving material processing methods. Through his work at Motorola Corporation and collaborations with esteemed colleagues, Stager continues to make significant strides in the industry, setting a benchmark for future innovations.