Charles J Regan

Title: The Innovative Contributions of Charles J Regan

Introduction

Charles J Regan, based in Moraga, California, has made significant strides in the field of semiconductor wafer polishing with his innovative inventions. Holding three patents, Regan has developed unique technologies aimed at improving the efficiency and effectiveness of wafer polishing processes.

Latest Patents

Regan's latest patents include the "Retaining Ring for Wafer Polishing" and the "Polishing Head for a Chemical Mechanical Polishing Apparatus." The first patent presents an improved wafer polishing machine that features a movable polishing surface and a holder to securely position a semiconductor wafer against it. The design of the annular retaining ring, which holds the wafer in place, includes projections that ensure proper alignment and minimize buckling during the polishing process. This innovative design enhances surface uniformity, making it a vital advancement in semiconductor manufacturing.

The second patent revolves around a polishing head designed for chemical mechanical polishing (CMP) apparatuses. This polishing head incorporates a backplate and a retaining ring, with a bladder member that applies a specific pressure profile on the substrate during polishing. Such precise pressure application is crucial for achieving optimal polishing results.

Career Highlights

Throughout his career, Charles J Regan has lent his expertise to prominent companies such as Aplex, Inc. and Mosel Vitelic Corporation. His work in these organizations has contributed to advancements in semiconductor technology, particularly in wafer processing and polishing techniques.

Collaborations

Regan has collaborated with notable experts in the field, including David E Weldon and Shu-Hsin Kao. These partnerships have fostered innovation and have led to several advancements in semiconductor manufacturing processes.

Conclusion

In conclusion, Charles J Regan's contributions to the field of semiconductor wafer polishing through his three patents exemplify the innovative spirit and technical ingenuity that drive advancements in technology. His work not only improves manufacturing processes but also sets a benchmark for future innovations in the semiconductor industry.