Company Filing History:
Years Active: 1994-1995
Title: The Innovations of Charles C. Harris
Introduction
Charles C. Harris is a notable inventor based in Los Gatos, California. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the efficiency and effectiveness of semiconductor wafer processing.
Latest Patents
One of his latest patents is for a compound clamp ring for semiconductor wafers. This innovative clamp ring secures a semiconductor wafer to a pedestal during processing while maintaining a continuous seal to prevent leakage of coolant gases. The design includes an annular wafer clamp surface that presses the wafer into sealing abutment with the pedestal. Additionally, a cavity in the clamp ring houses a comb-like array of resilient flexures that apply a yieldable bias to the wafer's flat portion, ensuring a complete seal.
Another significant patent is for a clamping ring and susceptor designed for use in chemical vapor deposition chambers. This clamping ring features a downwardly extending finger that aligns with a pocket in the susceptor, supporting the wafer effectively. It includes a source of inert gas to maintain positive pressure, preventing reactive gases from reaching the wafer's edge. The design also incorporates a vacuum source to ensure good contact between the wafer and the susceptor, enhancing the overall efficiency of the process.
Career Highlights
Charles C. Harris is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work has been instrumental in advancing technologies that are critical for modern electronics.
Collaborations
Throughout his career, Harris has collaborated with talented individuals such as Semyon Sherstinsky and Mei Yin Chang. These collaborations have contributed to the development of innovative solutions in semiconductor processing.
Conclusion
Charles C. Harris is a distinguished inventor whose work in semiconductor technology has led to multiple patents and significant advancements in the field. His contributions continue to impact the industry positively.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.