This inventor holds 2 USPTO granted patents and 6 published patent applications. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2017-2021.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2017-2021
Title: Innovations by Chanhoon Park in Semiconductor Fabrication
Introduction
Chanhoon Park is a notable inventor based in Osan, South Korea. He has made significant contributions to the field of semiconductor device fabrication. With a total of 2 patents to his name, his work is recognized for its technical depth and innovative approaches.
Latest Patents
One of Chanhoon Park's latest patents is a "System for fabricating a semiconductor device." This system includes a chamber, an electrostatic chuck for loading a substrate, and a power source that supplies RF power to the electrostatic chuck. The design features an impedance matcher and a power transmission unit that connects the electrostatic chuck to the impedance matcher. The power transmission unit consists of a power rod and a coaxial cable, which are intricately designed to optimize the fabrication process.
Another significant patent is the "Method of fabricating a semiconductor device." This method involves etching a stack of first-material layers and second-material layers that are alternately disposed on a substrate. The process utilizes an end point detection signal of an etching reaction gas to etch the upper portion of the stack. It also includes obtaining a function of the injection time of an etchant concerning the depth of an opening, which is crucial for the etching of the lower portion of the stack.
Career Highlights
Chanhoon Park is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in semiconductor technology. His work has contributed to advancements in the efficiency and effectiveness of semiconductor fabrication processes.
Collaborations
He has collaborated with notable coworkers, including Il Sup Choi and Hoyong Park, who share his commitment to advancing technology in the semiconductor field.
Conclusion
Chanhoon Park's contributions to semiconductor fabrication through his innovative patents highlight his expertise and dedication to the field. His work at Samsung Electronics Co., Ltd. continues to influence the industry positively.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile