Company Filing History:
Years Active: 2019-2025
Title: Changyou Jing: Innovator in Electrostatic Chuck Technology
Introduction
Changyou Jing is a prominent inventor based in Livermore, CA (US), known for his contributions to the field of electrostatic chuck technology. With a total of 8 patents, he has made significant advancements that enhance the performance and efficiency of substrate processing systems.
Latest Patents
One of his latest patents is focused on an electrostatic chuck heater resistance measurement to approximate temperature. This invention includes a controller with a voltage sensor coupled to a heater trace integrated into an electrostatic chuck. The voltage sensor is designed to sense a voltage difference across the heater trace, which is associated with a heater zone. Additionally, the controller features a current sensor that detects the current in the heater trace. A resistance identifier within the controller identifies the resistance of the heater trace based on the sensed voltage difference and current. Furthermore, a temperature correlator approximates the temperature of the heater zone using the resistance and a correlation function that incorporates the temperature coefficient of resistance of the heater trace.
Another notable patent is the RF immune sensor probe for monitoring the temperature of an electrostatic chuck in a substrate processing system. This sensor probe consists of an elongated body with an inner cavity and a printed circuit board fitted within it. A first temperature-sensing integrated circuit is mounted at one end of the printed circuit board, while a cap is attached to the end adjacent to this circuit. The housing of the probe is designed to receive the opposite end of the elongated body, allowing it to be mounted to a baseplate of a substrate support.
Career Highlights
Changyou Jing is currently employed at Lam Research Corporation, where he continues to innovate and develop technologies that improve substrate processing. His work has been instrumental in advancing the capabilities of electrostatic chucks, which are critical components in semiconductor manufacturing.
Collaborations
Throughout his career, Changyou has collaborated with notable colleagues, including Fred Egley and Oleksandr Mikhnenko. These collaborations have fostered an environment of innovation and have contributed to the successful development of new technologies.
Conclusion
Changyou Jing's contributions to electrostatic chuck technology have significantly impacted the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in substrate processing systems.
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