Chang Yong Xiao

Title: Chang Yong Xiao: Innovator in Sandwich Damascene Resistors

Introduction

Chang Yong Xiao is a notable inventor based in Mechanicville, NY (US). He has made significant contributions to the field of semiconductor technology, particularly in the development of sandwich damascene resistors. With a total of 2 patents to his name, his work continues to influence advancements in this area.

Latest Patents

One of Chang Yong Xiao's latest patents involves a method for forming sandwich damascene resistors in metal-oxide-layer (MOL) processes. This innovative method includes several steps: forming a film stack on a substrate that consists of an interlayer dielectric (ILD), a first dielectric layer, and a sacrifice layer (SL). The process then involves removing a portion of the SL and the first dielectric layer to create a first cavity. Following this, a layer of resistive material is conformally formed in the first cavity and over the SL. A second dielectric layer is deposited over the layer of resistive material, filling the first cavity. Finally, the second dielectric layer, along with the layer of resistive material not in the first cavity, is removed, along with at least a partial depth of the SL.

Career Highlights

Chang Yong Xiao is currently employed at Globalfoundries Singapore Pte. Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in enhancing the performance and efficiency of electronic devices.

Collaborations

Throughout his career, Chang has collaborated with talented individuals such as Roderick Miller and Jie Chen. These partnerships have fostered innovation and contributed to the successful development of new technologies.

Conclusion

Chang Yong Xiao is a prominent figure in the field of semiconductor technology, with a focus on sandwich damascene resistors. His innovative methods and collaborations have made a lasting impact on the industry.