Location History:
- Seoul, KR (1998)
- Songtan, KR (1998)
- Kwangmyeong, KR (1995 - 1999)
Company Filing History:
Years Active: 1995-1999
Title: Chang-jin Sohn: Innovator in Semiconductor Lithography
Introduction
Chang-jin Sohn is a prominent inventor based in Kwangmyeong, South Korea. He has made significant contributions to the field of semiconductor device manufacturing, particularly in lithography processes. With a total of 8 patents to his name, Sohn's work has advanced the technology used in the production of integrated circuits.
Latest Patents
Sohn's latest patents focus on projection exposure systems. One of his notable inventions is a projection method that utilizes a modified illumination technique for lithography processes in semiconductor devices. This method enhances the resolution of lithography by removing the vertical incident component of light that passes through a condenser lens. The innovative approach allows for the destructive interference of zero-order diffracted light and constructive interference of the oblique component of first-order diffracted light. As a result, the obliquely incident light effectively illuminates a mask with a specific pattern. This advancement improves the contrast and depth of focus in lithography processes, enabling the formation of patterns for 64 Mb DRAMs using conventional projection exposure systems.
Career Highlights
Chang-jin Sohn is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in enhancing the efficiency and effectiveness of lithography processes, which are critical in the production of modern electronic devices.
Collaborations
Sohn has collaborated with notable colleagues, including Woo-Sung Han and Cheol-hong Kim. These partnerships have fostered innovation and have contributed to the successful development of advanced semiconductor technologies.
Conclusion
Chang-jin Sohn's contributions to the field of semiconductor lithography have made a lasting impact on the industry. His innovative methods and collaborative efforts continue to drive advancements in technology, ensuring the ongoing evolution of semiconductor manufacturing processes.