This inventor holds 1 USPTO granted patent and 2 published patent applications. Top assignee: Semes Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Chan Yong An: Advancing Substrate Processing Technology
Introduction
Chan Yong An is an inventor associated with Cheonan, South Korea, and Semes Co., Ltd. The available information credits her with 1 patent related to substrate processing technology.
Latest Patents
Her listed patent, “Substrate Processing Apparatus and Substrate Processing Method,” describes an apparatus designed to control plasma flow or density near the edge of a substrate. It includes a chamber, a unit that supports the substrate, and a ring positioned around the support unit’s edge. An impedance control unit connects electrically to the ring, while a filter unit is placed between them.
Career Highlights
The patent reflects work on controlling plasma conditions in a substrate’s edge region, a feature relevant to semiconductor processing equipment. The available information associates Chan Yong An’s work with Semes Co., Ltd.
Collaborations
Ja Myung Gu and Sang Moon Yoo are identified as coworkers associated with the patent information.
Conclusion
Chan Yong An’s listed invention focuses on plasma control at the substrate edge, contributing to the development of substrate processing apparatus and methods.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile