This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Chan Kyu Lim and Semiconductor Gas-Supply Innovation.
Introduction
Chan Kyu Lim is an inventor associated with Suwon, South Korea, and Samsung Electronics Co., Ltd. The supplied information credits her with 1 patent concerning semiconductor manufacturing equipment and process-gas delivery.
Latest Patents
Lim’s listed patent is titled “Semiconductor Manufacturing Apparatus, Gas Supplying Method Using the Same, and Semiconductor Manufacturing Method Using the Same.” It describes an apparatus and methods for supplying process gas during semiconductor manufacturing.
In the disclosed method, heating devices warm a gas tank and gas line before reaction gas is introduced into the tank. The equipment then changes the gas’s temperature, which can decompose part of the reaction gas into different materials, and supplies the gas from the tank to a process chamber. This approach addresses temperature control and gas delivery within semiconductor processing.
Career Highlights
The available information connects Lim’s patent work with Samsung Electronics Co., Ltd. Her listed invention focuses on gas handling and temperature management in semiconductor manufacturing.
Collaborations
The supplied information names Yoonbon Koo and Hanhim Kang as Lim’s coworkers. Their specific roles in the patent or related work are not provided.
Conclusion
Chan Kyu Lim’s listed patent presents a semiconductor gas-supply system that combines heating, temperature adjustment, and controlled delivery to a process chamber.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile