Location History:
- Whasong-gun, KR (2005)
- Anyang-si, KR (2006)
Company Filing History:
Years Active: 2005-2006
Title: Innovations of Chan-Hyung Cho
Introduction
Chan-Hyung Cho is a notable inventor based in Anyang-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to enhancing device performance.
Latest Patents
His latest patents include a method of enlarging the contact area of a gate electrode and a semiconductor device featuring a surface-enlarged gate electrode. This invention allows for a highly integrated semiconductor device that operates at high speeds due to low resistance at the gate electrode and minimal parasitic capacitance between the gate electrode and substrate. The process involves forming a gate pattern on a substrate, followed by the creation of an insulating layer over the substrate. The thickness of this insulating layer is reduced until it is beneath the level of the gate electrode's upper surface. A conductive layer is then formed and anisotropically etched to create wings that act as a first spacer on the upper sidewalls of the gate pattern. The insulating layer is subsequently etched to leave a portion beneath the wings, which serves as a capacitance preventative layer against parasitic capacitors during the formation of source/drain electrodes.
Another significant patent is a residual gas removing device and method for a gas supply apparatus in a semiconductor fabrication facility. This device includes a low-stress valve positioned between a mass flow controller and a chamber, which alternately supplies or cuts off gas to the chamber. A WF6 gas removing apparatus is in flow communication with the gas inlet line of the low-stress valve to eliminate residual WF6 gas before proceeding with subsequent deposition steps.
Career Highlights
Chan-Hyung Cho is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in developing devices that enhance performance and efficiency in the semiconductor industry.
Collaborations
He has collaborated with notable coworkers such as Sung-Gyu Park and Chul-Hwan Choi, contributing to various projects that aim to innovate and improve semiconductor technologies.
Conclusion
Chan-Hyung Cho's contributions to semiconductor technology through his patents reflect his dedication to innovation and excellence in the field. His work continues to influence the development of high-performance semiconductor devices.