This inventor holds 1 USPTO granted patent. Top assignee: Speedfam-Ipec Corporation. Active years: 2001.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2001
Title: Innovations of Chad J Voelkers
Introduction
Chad J Voelkers is an accomplished inventor based in Mesa, AZ. He has made significant contributions to the field of vacuum systems, particularly in the context of wafer processing. His innovative approach has led to the development of a unique patent that addresses critical challenges in the industry.
Latest Patents
Chad holds a patent for a "Vacuum system coupled to a wafer chuck for holding wet wafers." This invention relates to a vacuum system designed to reliably hold wafers that are exposed to effluents in a wafer chuck. The system utilizes a vacuum pump to generate a vacuum that is communicated to the wafer chuck through a tank. The tank features a baffle that converts vapor effluent into liquid effluent, effectively managing the air sucked into the vacuum system. This design prevents fouling of the vacuum pump and other components by storing the liquid effluent. Additionally, a pressure transducer is connected to the tank to detect any loss in vacuum, which may indicate a lost wafer condition. A trap is also included between the tank and the vacuum pump to signal if excessive effluents have escaped, prompting necessary corrective actions. Chad's innovative design has the potential to enhance the efficiency and reliability of wafer processing.
Career Highlights
Chad is currently employed at Speedfam-Ipec Corporation, where he continues to develop and refine technologies related to wafer processing. His work has been instrumental in advancing the capabilities of vacuum systems in the semiconductor industry.
Collaborations
Chad has collaborated with notable colleagues, including Gregory A Olsen and Christopher J Lichner. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Chad J Voelkers is a notable inventor whose contributions to vacuum systems have made a significant impact in the semiconductor industry. His patent for a vacuum system coupled to a wafer chuck exemplifies his innovative spirit and dedication to improving technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile