Carsten Fuelber

Title: Carsten Fuelber: Innovator in Photolithographic Patterning

Introduction

Carsten Fuelber is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of photolithography, particularly through his innovative patent that enhances the patterning process using advanced materials.

Latest Patents

Carsten Fuelber holds a patent for a "Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process." This patent describes a method where a carbon hard mask layer is applied to a substrate, achieving a hardness comparable to diamond. The process involves careful parameter settings during deposition to ensure that non-diamond-like growth regions are removed in situ through subsequent etching, while retaining the diamond-like regions.

Career Highlights

Fuelber's career is marked by his work at Infineon Technologies AG, where he has been instrumental in advancing photolithographic techniques. His expertise in plasma-enhanced deposition processes has positioned him as a key figure in the development of high-performance materials for various applications.

Collaborations

Throughout his career, Carsten has collaborated with esteemed colleagues such as Guenther Czech and Markus M Kirchhoff. These partnerships have fostered innovation and contributed to the success of their projects.

Conclusion

Carsten Fuelber's contributions to the field of photolithography through his innovative patent demonstrate his commitment to advancing technology. His work continues to influence the industry and inspire future innovations.