Company Filing History:
Years Active: 1999-2000
Title: Carol Elaine Gustafson: Innovator in Wafer Polishing Technology
Introduction
Carol Elaine Gustafson is a notable inventor based in Poughkeepsie, NY (US). She has made significant contributions to the field of semiconductor manufacturing, particularly in wafer polishing technology. With a total of 2 patents, her innovations have enhanced the efficiency and effectiveness of wafer processing.
Latest Patents
One of her latest patents is the "Wafer Carrier Assembly." This invention includes a subassembly for in-situ nondestructive pad conditioning, characterized by continuously cleansing the pad surface with an energized fluid. The fluid may be abrasive, such as a slurry, or non-abrasive, like DeIonized (DI) water. Additionally, the fluid assists in removing slurry and residual materials from the pad surface, followed by a DI water rinse. The chemical used can be either liquid or gas.
Another significant patent is the "Vertical Polishing Tool and Method." This invention discloses a vertically-oriented wafer polishing apparatus and method. It includes a vertically-oriented polishing device, a semiconductor wafer carrier, and a cleaning module to remove contaminants that may scratch the wafer and reduce the polishing rate. This device minimizes the 'down time' of a polishing apparatus, thereby increasing the yield of well-polished wafers in a given time period.
Career Highlights
Carol is currently employed at International Business Machines Corporation (IBM), where she continues to innovate in the field of semiconductor technology. Her work has been instrumental in advancing the capabilities of wafer polishing processes.
Collaborations
Throughout her career, Carol has collaborated with notable colleagues, including Thomas R. Fisher, Jr. and Michael F. Lofaro. These collaborations have contributed to the development of her patented technologies and have fostered a spirit of innovation within her team.
Conclusion
Carol Elaine Gustafson is a pioneering inventor whose work in wafer polishing technology has made a significant impact on the semiconductor industry. Her patents reflect her commitment to enhancing manufacturing processes and improving product quality.