The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 1999
Filed:
Apr. 30, 1997
Thomas Robert Fisher, Jr, Beacon, NY (US);
Carol Elaine Gustafson, Poughkeepsie, NY (US);
William Francis Landers, Wappingers Falls, NY (US);
John Carlo Minunni, Jr, Wappingers Falls, NY (US);
Thomas Edwin Sandwick, Hopewell Junction, NY (US);
Adam Dan Ticknor, Wappingers Falls, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A vertically-oriented wafer polishing apparatus and method is disclosed including a vertically-oriented polishing device, a semiconductor wafer carrier and a cleaning module to clean the polishing device by removing contaminants that may scratch the wafer and also reduce the polishing rate of the apparatus. The device reduces the 'down time' of a polishing apparatus and, therefore, increases the yield of well-polished wafers in a given time period.