This inventor holds 1 USPTO granted patent. Top assignee: Entegris, Inc.. Active years: 2006.
Company Filing History:
Years Active: 2006
Title: Carly Shellhammer: Innovator in Reactive Gas Filtration
Introduction
Carly Shellhammer is a notable inventor based in Brighton, MA (US). She has made significant contributions to the field of semiconductor processing through her innovative work on gas filtration technologies. Her expertise and dedication to improving semiconductor processes have led to the development of a unique patent.
Latest Patents
Carly Shellhammer holds a patent for a Reactive Gas Filter. This invention provides a gas filter specifically designed for reactive gases used in semiconductor processing tools and processes that are sensitive to molecular contamination. The reactive gas filter boasts improved pressure drop characteristics and can deliver an output gas stream with concentrations of less than about 1 ppbv for both ammonia and sulfur dioxide. This is achieved for input gas streams with ammonia and sulfur dioxide concentrations of no greater than about 10 ppbv and 5 ppbv, respectively, using a filter media volume of no greater than about 0.5 liters.
Career Highlights
Carly is currently employed at Entegris, Inc., where she continues to advance her research and development efforts in gas filtration technologies. Her work is crucial in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Carly collaborates with talented professionals in her field, including coworkers William M. Goodwin and David Ruede. Their combined expertise contributes to the innovative environment at Entegris, Inc.
Conclusion
Carly Shellhammer's contributions to the field of reactive gas filtration exemplify her commitment to innovation in semiconductor processing. Her patent and ongoing work at Entegris, Inc. highlight her role as a leading inventor in this critical area of technology.