Grenoble, France

Cao-Minh Vincent Lu


Average Co-Inventor Count = 6.0

ph-index = 1


Company Filing History:


Years Active: 2025

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1 patent (USPTO):Explore Patents

Title: Innovations by Cao-Minh Vincent Lu in Semiconductor Technology

Introduction

Cao-Minh Vincent Lu is a prominent inventor based in Grenoble, France, recognized for his contributions to the field of semiconductor technology. With a focus on precision oxidation control, Lu's innovative approach has led to significant advancements in the processing of semiconductor substrates. His work at Applied Materials, Inc., highlights the intersection of research and practical application in the industry.

Latest Patents

Cao-Minh Vincent Lu holds a patent titled "Method for precision oxidation control by ion implantation." This groundbreaking method involves processing a semiconductor substrate through a dual ion implantation process. In the first step, a first ion beam composed of an ionized first dopant species is directed at the top surface of the substrate, allowing implanting in a second portion while blocking a first portion. In the second process, a second ion beam with a different dopant species is also directed at the substrate in a similar manner. Notably, the oxidation rates of the two portions are carefully controlled in a way that the effects of the ion implantations counterbalance each other, leading to enhanced control over the oxidation process.

Career Highlights

Cao-Minh Lu's career is marked by his role at Applied Materials, Inc., a leading company in the field of materials engineering. His expertise in semiconductor processing techniques exemplifies the innovative spirit at Applied Materials, where he continues to push the boundaries of technology.

Collaborations

Throughout his career, Lu has collaborated with talented professionals, including Supakit Charnvanichborikarn and Ana Cristina Gomez Herrero. These partnerships are essential in fostering a collaborative environment that encourages innovation and the exchange of ideas within the semiconductor research community.

Conclusion

Cao-Minh Vincent Lu's contributions to semiconductor technology, particularly through his patented method for precision oxidation control, highlight his role as an influential inventor in the industry. His work not only advances technological capabilities but also sets a precedent for future innovations in the field. As the semiconductor industry continues to evolve, inventors like Lu are crucial in shaping its future through groundbreaking research and applications.

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