Location History:
- Hayward, CA (US) (1999 - 2001)
- Castro Valley, CA (US) (2008 - 2011)
Company Filing History:
Years Active: 1999-2011
Title: Innovations of C Robert Koemtzopoulos
Introduction
C Robert Koemtzopoulos is a notable inventor based in Hayward, CA (US). He has made significant contributions to the field of semiconductor processing, holding a total of 10 patents. His work primarily focuses on improving the efficiency and accuracy of etching processes in semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Process for wafer temperature verification in etch tools." This innovative process involves placing a blank wafer in an etch chamber, depositing a layer over it, and measuring the thickness of the deposited layer to calculate wafer temperature accuracy. The etch chamber is then compensated based on this calculated accuracy. Another significant patent is for "Dual doped polysilicon and silicon germanium etch." This method provides a way to etch a stack with at least one silicon germanium layer over a substrate, utilizing a specific etchant gas and cooling the substrate to below 40°C before transforming the etching gas into plasma.
Career Highlights
C Robert Koemtzopoulos is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His expertise in etching processes has been instrumental in advancing the technology used in the industry.
Collaborations
Throughout his career, Koemtzopoulos has collaborated with notable colleagues, including Felix Leib Kozakevich and David Trussell. These collaborations have contributed to the development of innovative solutions in semiconductor processing.
Conclusion
C Robert Koemtzopoulos is a distinguished inventor whose work has significantly impacted the semiconductor industry. His patents reflect his commitment to enhancing etching processes, showcasing his expertise and innovative spirit.