This inventor holds 1 USPTO granted patent and 4 published patent applications. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Byungsoo Joo - Innovator in Wafer Cleaning Technology
Introduction
Byungsoo Joo is an inventor based in Suwon-si, South Korea. He is known for his innovative contributions to the field of wafer cleaning technology. Although he currently holds no granted patents, his work in this area is noteworthy.
Latest Patent Applications
Byungsoo Joo has submitted several patent applications that showcase his inventive ideas. One of his latest applications is for a "WAFER CLEANING DEVICE INCLUDING CHUCK TABLE." This device features a chuck stage designed to hold a wafer, with multiple ports for adsorbing the wafer and sucking liquid through the chuck stage. Additionally, it includes a pressure adjuster that provides vacuum pressure, allowing for selective communication with the exterior of the chuck stage.
Another significant application is for a "BUFFING CLEANING APPARATUS." This apparatus consists of a chuck table with a vacuum hole and a film on its upper surface. The film has a communication hole that aligns with the vacuum hole, enabling effective cleaning of the wafer placed on top. The design also incorporates a drain hole for liquid drainage, enhancing the cleaning process.
Conclusion
Byungsoo Joo's innovative patent applications reflect his commitment to advancing wafer cleaning technology. His contributions, although not yet patented, demonstrate a promising future in the field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile