The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
Sep. 23, 2024
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Inhak Jeon, Suwon-si, KR;
Donghoon Kwon, Suwon-si, KR;
Jihoon Park, Suwon-si, KR;
Seungyong Yu, Suwon-si, KR;
Byungsoo Joo, Suwon-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
H10P 72/0406 (2026.01);
Abstract
A buffing cleaning apparatus includes chuck table having a vacuum hole, and a film disposed on an upper surface of the chuck table, the film having a communication hole vertically overlapping the vacuum hole. An upper surface of the film is configured to receive a wafer. The film has a drain hole configured to drain liquid through the drain hole. The chuck table has a drain groove vertically overlapping the drain hole.