Byung-kwan Lee

Title: Byung-kwan Lee: Innovator in Semiconductor Device Fabrication

Introduction

Byung-kwan Lee is a prominent inventor based in Incheon, South Korea. He has made significant contributions to the field of semiconductor device fabrication, holding a total of 3 patents. His innovative work has been instrumental in advancing technology in this critical area.

Latest Patents

One of his latest patents involves a developing device for semiconductor device fabrication. This device accomplishes the complete removal of by-products formed during the development of a photoresist. It achieves this by inverting the wafer over a container of developer and dipping the pattern-forming face into the developer. While the wafer remains inverted, the pattern-forming face is sprayed with a rinse, and the wafer is spun to remove the rinse and by-products. The device includes a container supplied with developer, a spin chuck using vacuum suction to hold the wafer, a driving motor for rotation, a vertical driver for moving the wafer, and an inverting driver for selectively turning the pattern-forming face of the wafer.

Another notable patent is for a thermal processing apparatus for semiconductor wafers. This apparatus features a table with a heating chamber, a holding chamber, and a cassette stage for holding the wafers. It includes a boat transfer part for moving the boat between the holding and heating chambers, a wafer charging part for transferring wafers from a cassette to the boat, and a wafer discharging part for returning the wafers back to the cassette.

Career Highlights

Byung-kwan Lee is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to focus on developing innovative solutions for semiconductor technology.

Collaborations

He has collaborated with notable coworkers, including Woung-kwan An and Dong-Ho Kim, contributing to various projects that enhance semiconductor fabrication processes.

Conclusion

Byung-kwan Lee's contributions to semiconductor device fabrication through his patents and work at Samsung Electronics Co., Ltd. highlight his role as an influential inventor in the field. His innovative approaches continue to shape the future of technology in this critical industry.